Web1 Apr 2006 · Stray light is incoherent light that does not follow the normal optical path and degrades lithographic performances , , . In the previous work [3] , we evaluated the stray light as constructing Power Spectral Density (PSD) of the lens pupil surface of lithographic tools from the ‘disappearing pad test’ known as ‘Kirk test’ [1] . WebThe stray light value can now be calculated from the absorbance maximum obtained, using the following formula: Sλ = 0.25 x 10-2∆A. The following acceptance criteria apply: ∆A ≥ …

Stage Lighting 101 Guide - Everything You Need to Know

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Fig. 3. The simulation of the stray light with different combinations...

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