Lithographic apparatus
WebIn a lithographic projection apparatus, a structure surrounds a space between the projection system and a substrate table of the lithographic projection apparatus. A gas … WebKnown lithographic apparatus include so-called steppers, in which each target portion is irradiated by exposing an entire pattern onto the target portion in one go, and so-called …
Lithographic apparatus
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WebIn a lithographic projection apparatus, a structure surrounds a space between the projection system and a substrate table of the lithographic projection apparatus. A gas … WebA lithographic apparatus is a machine that applies a desired pattern onto a target portion of a substrate. Lithographic apparatus can be used, for example, in the manufacture of …
WebIn a lithographic apparatus, a feedforward transfer function of a control system, is determined by: a) iteratively learning a feedforward output signal of the control system by … WebA lithographic apparatus is described, the lithographic apparatus comprising: an illumination system configured to condition a radiation beam; a support constructed to …
WebTo provide an improved conduit system, the lithographic apparatus further includes a control system which is used to control the movement of the object based on … Web9 jul. 2009 · Abstract. A lithographic apparatus configured to project a patterned beam of radiation onto a target portion of a substrate is disclosed. The apparatus includes …
WebAn immersion lithography apparatus is disclosed in which liquid is supplied to a space between a projection system and a substrate, and a plate structure is provided to divide the space into two parts. The plate structure has an aperture to allow transmission of the projection beam, has through holes in it to reduce the damping effect of the presence of …
WebNational Center for Biotechnology Information. 8600 Rockville Pike, Bethesda, MD, 20894 USA. Contact. Policies. FOIA. HHS Vulnerability Disclosure. National Library of … fishing bobber definitionWebThe lithographic apparatus includes a projection system configured to project a patterned radiation beam to form an exposure area of a substrate held on a substrate table. The … fishing bobber images clip artWebKnown lithographic apparatus include so-called steppers, in which each target portion is irradiated by exposing an entire pattern onto the target portion in one go, and so-called scanners, in which each target portion is irradiated by scanning the pattern through the projection beam in a given direction (the “scanning”-direction) while synchronously … can bad thermostat cause check engine lightWeb588740692 - EP 4162324 A1 20240412 - SUBSTRATE HOLDER FOR USE IN A LITHOGRAPHIC APPARATUS AND A METHOD OF MANUFACTURING A … fishing bobber coolerWeb1. A lithographic apparatus arranged to project a pattern from a patterning device onto a substrate through a liquid confined in a space adjacent the substrate and along a beam path in the space, the apparatus comprising: a liquid confinement structure configured to at least partly confine the liquid in the space, the liquid confinement structure having, a liquid … fishing bobber clipartWebTypical wavelengths currently in use are 365 nm (i-line), 248 nm, 193 nm and 13.5 nm. A lithographic apparatus, which uses extreme ultraviolet (EUV) radiation, having a wavelength within the range 4-20 nm, for example 6.7 nm or 13.5 nm, may be used to form smaller features on a substrate than a lithographic apparatus which uses, ... fishing bobbers amazonWebLithographic projection apparatus专利检索，Lithographic projection apparatus属于·渗析专利检索，找专利汇即可免费查询专利，·渗析专利汇是一家知识产权数据服务商，提供 … fishing bobber jpg